The current institutional shareholding score of Onto Innovation Inc is 10.00, ranking 1 out of 105 in the Semiconductors & Semiconductor Equipment industry. The latest institutional shareholding proportion is 107.82%, representing a quarter-over-quarter increase of 8.68%. The largest institutional shareholder is Steven Cohen, holding a total of 924.84K shares, representing 2.42% of shares outstanding, with 0.01% increase in holdings.