The current institutional shareholding score of Axcelis Technologies Inc is 10.00, ranking 1 out of 105 in the Semiconductors & Semiconductor Equipment industry. The latest institutional shareholding proportion is 116.98%, representing a quarter-over-quarter decrease of 5.15%. The largest institutional shareholder is ETHSX, holding a total of 121.08K shares, representing 0.67% of shares outstanding, with 1.00% increase in holdings.